Invention Grant
- Patent Title: Hermetically sealed wafer packages
- Patent Title (中): 密封晶圆封装
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Application No.: US13163935Application Date: 2011-06-20
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Publication No.: US08975105B2Publication Date: 2015-03-10
- Inventor: Cody B. Moody
- Applicant: Cody B. Moody
- Applicant Address: US MA Waltham
- Assignee: Raytheon Company
- Current Assignee: Raytheon Company
- Current Assignee Address: US MA Waltham
- Agency: Burns & Levinson LLP
- Agent Joseph M. Maraia
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/30 ; H01L21/46 ; H01L23/10 ; H01L21/56 ; H01L23/00

Abstract:
Hermetically sealed semiconductor wafer packages that include a first bond ring on a first wafer facing a complementary surface of a second bond ring on a second wafer. The package includes first and second standoffs of a first material, having a first thickness, formed on a surface of the first bond ring. The package also includes a eutectic alloy (does not have to be eutectic, typically it will be an alloy not specific to the eutectic ratio of the elements) formed from a second material and the first material to create a hermetic seal between the first and second wafer, the eutectic alloy formed by heating the first and second wafers to a temperature above a reflow temperature of the second material and below a reflow temperature of the first material, wherein the eutectic alloy fills a volume between the first and second standoffs and the first and second bond rings, and wherein the standoffs maintain a prespecified distance between the first bond ring and the second bond ring.
Public/Granted literature
- US20120319261A1 HERMETICALLY SEALED WAFER PACKAGES Public/Granted day:2012-12-20
Information query
IPC分类: