Invention Grant
US08975130B2 Methods of forming bipolar devices and an integrated circuit product containing such bipolar devices
有权
形成双极器件的方法和包含这种双极器件的集成电路产品
- Patent Title: Methods of forming bipolar devices and an integrated circuit product containing such bipolar devices
- Patent Title (中): 形成双极器件的方法和包含这种双极器件的集成电路产品
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Application No.: US13930611Application Date: 2013-06-28
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Publication No.: US08975130B2Publication Date: 2015-03-10
- Inventor: Jerome Ciavatti , Roderick Miller , Marc Tarabbia
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L27/06 ; H01L21/8249

Abstract:
One method disclosed herein includes performing at least one common process operation to form a plurality of first gate structures for each of a plurality of field effect transistors and a plurality of second gate structures above a region where a bipolar transistor will be formed and performing an ion implantation process and a heating process to form a continuous doped emitter region that extends under all of the second gate structures. A device disclosed herein includes a first plurality of field effect transistors with first gate structures, a bipolar transistor that has an emitter region and a plurality of second gate structures positioned above the emitter region, wherein the bipolar transistor comprises a continuous doped emitter region that extends laterally under all of the plurality of second gate structures.
Public/Granted literature
- US20150001634A1 METHODS OF FORMING BIPOLAR DEVICES AND AN INTEGRATED CIRCUIT PRODUCT CONTAINING SUCH BIPOLAR DEVICES Public/Granted day:2015-01-01
Information query
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