Invention Grant
- Patent Title: Method of sealing two plates with the formation of an ohmic contact therebetween
- Patent Title (中): 密封两块板之间形成欧姆接触的方法
-
Application No.: US10584052Application Date: 2004-12-21
-
Publication No.: US08975156B2Publication Date: 2015-03-10
- Inventor: Stephane Pocas , Hubert Moriceau , Jean-Francois Michaud
- Applicant: Stephane Pocas , Hubert Moriceau , Jean-Francois Michaud
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0351190 20031223
- International Application: PCT/FR2004/050742 WO 20041221
- International Announcement: WO2005/064657 WO 20050714
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/46 ; H01L21/18 ; H01L21/265 ; H01L21/266

Abstract:
A method of sealing a first wafer and a second wafer each made of semiconducting materials, including: implanting a metallic species in at least the first wafer, assembling the first wafer and the second wafer by molecular bonding, and after the molecular bonding, forming a metallic ohmic contact including alloys formed between the implanted metallic species and the semiconducting materials of the first wafer and the second wafer, the metallic ohmic contact being formed at an assembly interface between the first wafer and the second wafer, wherein the forming includes causing the implanted metallic species to diffuse towards the interface between the first wafer with the second wafer and beyond the interface.
Public/Granted literature
- US20070072391A1 Method of sealing two plates with the formation of an ohmic contact therebetween Public/Granted day:2007-03-29
Information query
IPC分类: