Invention Grant
- Patent Title: Method of manufacture of an optoelectronic device and an optoelectronic device manufactured using the method
- Patent Title (中): 使用该方法制造的光电器件和光电器件的制造方法
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Application No.: US14238558Application Date: 2012-08-09
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Publication No.: US08975169B2Publication Date: 2015-03-10
- Inventor: Kevin Peter Homewood , Russell Mark Gwilliam
- Applicant: Kevin Peter Homewood , Russell Mark Gwilliam
- Applicant Address: GB Surrey
- Assignee: The University of Surrey
- Current Assignee: The University of Surrey
- Current Assignee Address: GB Surrey
- Agency: Stites & Harbison PLLC
- Agent Nicholas B. Trenkle
- Priority: GB1114365.8 20110822
- International Application: PCT/EP2012/065559 WO 20120809
- International Announcement: WO2013/026706 WO 20130228
- Main IPC: H01L21/425
- IPC: H01L21/425 ; H01L21/265 ; H01L33/00 ; H01L29/36 ; H01L33/02 ; H01S5/30 ; H01L33/34

Abstract:
A method of manufacture of an optoelectronic device includes the steps of: providing or forming a body of crystalline silicon containing substitutional carbon atoms, and irradiating said body of crystalline silicon with protons (H+) to create radiative defect centers in a photoactive region of the device, wherein at least some of said defect centers are G-center complexes having the form Cs—SiI—Cs, where Cs is a substitutional carbon atom and S¾ is an interstitial silicon atom. An optoelectronic device (FIG. 3) manufactured using the method is described.
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