Invention Grant
US08975531B2 Composite copper wire interconnect structures and methods of forming 有权
复合铜线互连结构及成型方法

Composite copper wire interconnect structures and methods of forming
Abstract:
Various embodiments include interconnect structures and methods of forming such structures. The interconnect structures can include a composite copper wire which includes at least two distinct copper sections. The uppermost copper section can have a thickness of approximately 1 micrometer or less, which inhibits surface roughening in that uppermost section, and helps to enhance cap adhesion with overlying layers.
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