Invention Grant
- Patent Title: Composite copper wire interconnect structures and methods of forming
- Patent Title (中): 复合铜线互连结构及成型方法
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Application No.: US13746627Application Date: 2013-01-22
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Publication No.: US08975531B2Publication Date: 2015-03-10
- Inventor: Felix Anderson , Zhong-Xiang He , Anthony K. Stamper
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Hoffman Warnick LLC
- Agent David A. Cain
- Main IPC: H05K1/09
- IPC: H05K1/09 ; H05K1/11 ; H05K3/40

Abstract:
Various embodiments include interconnect structures and methods of forming such structures. The interconnect structures can include a composite copper wire which includes at least two distinct copper sections. The uppermost copper section can have a thickness of approximately 1 micrometer or less, which inhibits surface roughening in that uppermost section, and helps to enhance cap adhesion with overlying layers.
Public/Granted literature
- US20140202746A1 COMPOSITE COPPER WIRE INTERCONNECT STRUCTURES AND METHODS OF FORMING Public/Granted day:2014-07-24
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