Invention Grant
US08975599B2 Image sensor, lithographic apparatus comprising an image sensor and use of an image sensor in a lithographic apparatus
有权
图像传感器，包括图像传感器的光刻设备和光刻设备中的图像传感器的使用
- Patent Title: Image sensor, lithographic apparatus comprising an image sensor and use of an image sensor in a lithographic apparatus
- Patent Title (中): 图像传感器，包括图像传感器的光刻设备和光刻设备中的图像传感器的使用
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Application No.: US11797505Application Date: 2007-05-03
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Publication No.: US08975599B2Publication Date: 2015-03-10
- Inventor: Frank Staals , Joeri Lof , Erik Roelof Loopstra , Wim Tjibbo Tel , Bearrach Moest
- Applicant: Frank Staals , Joeri Lof , Erik Roelof Loopstra , Wim Tjibbo Tel , Bearrach Moest
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C
- Main IPC: G01J1/04
- IPC: G01J1/04 ; G21K5/10 ; G03F7/20 ; G03F9/00
Abstract:
The invention relates to an image sensor for detection of an aerial image formed by a beam of radiation in a lithographic projection apparatus for exposing a pattern onto a substrate held in a substrate plane by a substrate holder. The image sensor has an image detector and a lens. The lens is arranged to project at least part of the aerial image onto the image detector. The image sensor is positioned such within the substrate holder that the lens is positioned proximate the substrate plane.
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