Invention Grant
- Patent Title: Transistor device and fabrication method
- Patent Title (中): 晶体管器件及其制造方法
-
Application No.: US13686163Application Date: 2012-11-27
-
Publication No.: US08975642B2Publication Date: 2015-03-10
- Inventor: Neil Zhao , Mieno Fumitake
- Applicant: Neil Zhao , Mieno Fumitake
- Applicant Address: CN Shanghai
- Assignee: Semiconductor Manufacturing International Corp
- Current Assignee: Semiconductor Manufacturing International Corp
- Current Assignee Address: CN Shanghai
- Agency: Anova Law Group, PLLC
- Priority: CN201210241515 20120712
- Main IPC: H01L29/15
- IPC: H01L29/15 ; H01L29/78 ; H01L29/66 ; H01L29/16 ; H01L29/267 ; H01L29/10 ; H01L29/161 ; H01L29/165 ; H01L21/265

Abstract:
Various embodiments provide transistor devices and fabrication methods. An exemplary transistor device with improved carrier mobility can be formed by first forming a confining layer on a semiconductor substrate to confine impurity ions diffused from the semiconductor substrate to the confining layer. An epitaxial silicon layer can be formed on the confining layer, followed by forming a gate structure on the epitaxial silicon layer. A portion of the epitaxial silicon layer can be used as an intrinsic channel region. A source region and a drain region can be formed in portions of each of the epitaxial silicon layer, the confining layer, and the semiconductor substrate.
Public/Granted literature
- US20140014968A1 TRANSISTOR DEVICE AND FABRICATION METHOD Public/Granted day:2014-01-16
Information query
IPC分类: