Invention Grant
- Patent Title: Semiconductor device
- Patent Title (中): 半导体器件
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Application No.: US13907589Application Date: 2013-05-31
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Publication No.: US08975681B2Publication Date: 2015-03-10
- Inventor: Hajime Akiyama , Akira Okada
- Applicant: Mitsubishi Electric Corporation
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JP2012-205543 20120919
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/76 ; H01L27/06

Abstract:
In one surface of a semiconductor substrate, an active region in which main current flows and an IGBT is disposed is formed. A termination structure portion serving as an electric-field reduction region is formed laterally with respect to the active region. In the termination structure portion, a porous-oxide-film region, a p-type guard ring region, and an n+-type channel stopper region are formed. A plurality of floating electrodes are formed to contact the surface of the porous-oxide-film region. Another plurality of floating electrodes are formed to contact a first insulating film.
Public/Granted literature
- US20140077284A1 SEMICONDUCTOR DEVICE Public/Granted day:2014-03-20
Information query
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