Invention Grant
- Patent Title: Semiconductor device having a trench isolation structure
- Patent Title (中): 具有沟槽隔离结构的半导体器件
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Application No.: US13380806Application Date: 2011-08-09
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Publication No.: US08975700B2Publication Date: 2015-03-10
- Inventor: Qingqing Liang , Huilong Zhu , Huicai Zhong
- Applicant: Qingqing Liang , Huilong Zhu , Huicai Zhong
- Applicant Address: CN Beijing
- Assignee: Institute Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Martine Penilla Group, LLP
- Priority: CN201110197158 20110714
- International Application: PCT/CN2011/001308 WO 20110809
- International Announcement: WO2011/001308 WO 20110106
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/78 ; H01L21/84 ; H01L21/8238

Abstract:
The invention relates to a semiconductor device and a method for manufacturing such a semiconductor device. A semiconductor device according to an embodiment of the invention comprises: a substrate which comprises a base layer, an insulating layer on the base layer, and a semiconductor layer on the insulating layer; and a first transistor and a second transistor formed on the substrate, the first and second transistors being isolated from each other by a trench isolation structure formed in the substrate. Wherein at least a part of the base layer under at least one of the first and second transistors is strained, and the strained part of the base layer is adjacent to the insulating layer. The semiconductor device according to the invention increases the speed of the device and thus improves the performance of the device.
Public/Granted literature
- US20130015526A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2013-01-17
Information query
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