Invention Grant
US08975703B2 MOS transistor, formation method thereof, and SRAM memory cell circuit
有权
MOS晶体管,其形成方法和SRAM存储单元电路
- Patent Title: MOS transistor, formation method thereof, and SRAM memory cell circuit
- Patent Title (中): MOS晶体管,其形成方法和SRAM存储单元电路
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Application No.: US13739311Application Date: 2013-01-11
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Publication No.: US08975703B2Publication Date: 2015-03-10
- Inventor: Zhenghao Gan , Junhong Feng
- Applicant: Semiconductor Manufacturing International Corp.
- Applicant Address: CN Shanghai
- Assignee: Semiconductor Manufacturing International Corp.
- Current Assignee: Semiconductor Manufacturing International Corp.
- Current Assignee Address: CN Shanghai
- Agency: Anova Law Group, PLLC
- Priority: CN201210214272 20120626
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L27/092 ; H01L29/66 ; H01L27/11

Abstract:
Various embodiments provide an MOS transistor, a formation method thereof, and an SRAM memory cell circuit. An exemplary MOS transistor can include a semiconductor substrate including a first groove on one side of a gate structure and a second groove on the other side of the gate structure. The first groove can have a sidewall perpendicular to a surface of the semiconductor substrate. The second groove can have a sidewall protruding toward a channel region under the gate structure. A stressing material can be disposed in the first groove to form a drain region and in the second groove to form a source region. Stress generated in the channel region of the MOS transistor can be asymmetric. The MOS transistor can be used as a transfer transistor in an SRAM memory cell circuit to increase both read and write margins of the SRAM memory.
Public/Granted literature
- US20130341726A1 MOS TRANSISTOR, FORMATION METHOD THEREOF, AND SRAM MEMORY CELL CIRCUIT Public/Granted day:2013-12-26
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