Invention Grant
- Patent Title: Integrated circuit having an edge passivation and oxidation resistant layer and method
- Patent Title (中): 具有边缘钝化和抗氧化层的集成电路和方法
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Application No.: US13291664Application Date: 2011-11-08
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Publication No.: US08975721B2Publication Date: 2015-03-10
- Inventor: Gerhard Schmidt
- Applicant: Gerhard Schmidt
- Applicant Address: AT Villach
- Assignee: Infineon Technologies Austria AG
- Current Assignee: Infineon Technologies Austria AG
- Current Assignee Address: AT Villach
- Agency: Dicke, Billig & Czaja, PLLC
- Priority: DE102006011697 20060314
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L21/337 ; H01L21/336 ; H01L29/40 ; H01L29/06 ; H01L29/739 ; H01L29/74 ; H01L29/808 ; H01L29/872

Abstract:
An integrated circuit having a semiconductor component arrangement and production method is provided. The integrated circuit includes a semiconductor material region having a surface region and being laterally subdivided into a central region and into an edge region. The integrated circuit includes a passivation layer region, an oxide layer, and a VLD zone. The passivation layer region is formed on the surface region in the edge region and is configured to realize a field distribution at the edge of the semiconductor component arrangement. The oxide layer region is provided as a protection against oxidation on and in direct contact with the surface region of the semiconductor material region in the edge region. The oxide layer region or a part of the oxide layer region is formed in direct contact with a channel stopper region formed in the edge region.
Public/Granted literature
- US20120049325A1 INTEGRATED CIRCUIT HAVING A SEMICONDUCTOR ARRANGEMENT AND METHOD FOR PRODUCING IT Public/Granted day:2012-03-01
Information query
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