Invention Grant
- Patent Title: Laser crystal degradation compensation
- Patent Title (中): 激光晶体退化补偿
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Application No.: US13905346Application Date: 2013-05-30
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Publication No.: US08976343B2Publication Date: 2015-03-10
- Inventor: Patrick C. Genis
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N21/88 ; G02F1/35

Abstract:
Method and system for laser crystal degradation compensation are disclosed. The method includes: defining a plurality of sites on a frequency converting crystal; determining a degradation rate associated with each of the plurality of sites; determining an amount of time T wherein a site is continuously operable within a tolerated variation of at least one beam parameter, the amount of time T being determined based on the tolerated variation of the at least one beam parameter and the degradation rate; determining an amount of time t wherein t is a fraction of T; and iteratively shifting among the plurality of sites, wherein each of the plurality of sites is utilized continuously for a duration of time t for each iteration.
Public/Granted literature
- US20130342832A1 Laser Crystal Degradation Compensation Public/Granted day:2013-12-26
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