Invention Grant
US08976985B2 Acoustic sensor and microphone 有权
声传感器和麦克风

  • Patent Title: Acoustic sensor and microphone
  • Patent Title (中): 声传感器和麦克风
  • Application No.: US13378327
    Application Date: 2011-03-18
  • Publication No.: US08976985B2
    Publication Date: 2015-03-10
  • Inventor: Takashi Kasai
  • Applicant: Takashi Kasai
  • Applicant Address: JP Kyoto
  • Assignee: OMRON Corporation
  • Current Assignee: OMRON Corporation
  • Current Assignee Address: JP Kyoto
  • Agency: Nutter McClennen & Fish LLP
  • Agent John J. Penny, Jr.; Michael P. Visconti, III
  • Priority: JP2011-036904 20110223
  • International Application: PCT/JP2011/056587 WO 20110318
  • International Announcement: WO2012/114539 WO 20120830
  • Main IPC: H04R25/00
  • IPC: H04R25/00
Acoustic sensor and microphone
Abstract:
Provided is an acoustic sensor capable of improving an S/N ratio of a sensor without preventing reduction in size of the sensor. A diaphragm 43 as a movable electrode plate is formed on the top surface of a silicon substrate 42. The diaphragm 43 has a rectangular form, and four corners and midsections of long sides of the diaphragm 43 are supported by anchors 46. A displacement of the diaphragm 43 is minimal on a line D that connects between the anchors 46 at the midsections of the long sides. A displacement maximal point G, at which a displacement is maximal, is present on each side of the line D, and the line D extends in a direction intersecting with a line connecting between the displacement maximal points G.
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