Invention Grant
- Patent Title: Acoustic sensor and microphone
- Patent Title (中): 声传感器和麦克风
-
Application No.: US13378327Application Date: 2011-03-18
-
Publication No.: US08976985B2Publication Date: 2015-03-10
- Inventor: Takashi Kasai
- Applicant: Takashi Kasai
- Applicant Address: JP Kyoto
- Assignee: OMRON Corporation
- Current Assignee: OMRON Corporation
- Current Assignee Address: JP Kyoto
- Agency: Nutter McClennen & Fish LLP
- Agent John J. Penny, Jr.; Michael P. Visconti, III
- Priority: JP2011-036904 20110223
- International Application: PCT/JP2011/056587 WO 20110318
- International Announcement: WO2012/114539 WO 20120830
- Main IPC: H04R25/00
- IPC: H04R25/00

Abstract:
Provided is an acoustic sensor capable of improving an S/N ratio of a sensor without preventing reduction in size of the sensor. A diaphragm 43 as a movable electrode plate is formed on the top surface of a silicon substrate 42. The diaphragm 43 has a rectangular form, and four corners and midsections of long sides of the diaphragm 43 are supported by anchors 46. A displacement of the diaphragm 43 is minimal on a line D that connects between the anchors 46 at the midsections of the long sides. A displacement maximal point G, at which a displacement is maximal, is present on each side of the line D, and the line D extends in a direction intersecting with a line connecting between the displacement maximal points G.
Public/Granted literature
- US20140050338A1 ACOUSTIC SENSOR AND MICROPHONE Public/Granted day:2014-02-20
Information query