Invention Grant
- Patent Title: Electromagnetic wave pulse measuring device and method, and application device using the same
- Patent Title (中): 电磁波脉冲测量装置及方法及应用装置采用该方法
-
Application No.: US14375374Application Date: 2013-03-13
-
Publication No.: US08981300B2Publication Date: 2015-03-17
- Inventor: Oichi Kubota
- Applicant: Canon Kabushiki Kaisha
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2012-061391 20120319
- International Application: PCT/JP2013/058175 WO 20130313
- International Announcement: WO2013/141326 WO 20130926
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N21/3586 ; G01N29/07
Abstract:
An electromagnetic wave pulse measuring device, includes an elastic vibration wave generating section which irradiates a predetermined area of a sample with an elastic vibration wave, an electromagnetic wave pulse generating section which irradiates the predetermined area, which is irradiated with the elastic vibration wave, with an electromagnetic wave pulse, and an electromagnetic wave pulse detecting section which measures a waveform of the electromagnetic wave pulse modulated in the predetermined area by the elastic vibration wave. The timing at which the electromagnetic wave pulse detecting section measures the waveform of the electromagnetic wave pulse is a timing at which a phase angle of the elastic vibration wave has a predetermined value when the elastic vibration wave generating section generates the elastic vibration wave.
Public/Granted literature
- US20150008326A1 ELECTROMAGNETIC WAVE PULSE MEASURING DEVICE AND METHOD, AND APPLICATION DEVICE USING THE SAME Public/Granted day:2015-01-08
Information query
