Invention Grant
US08984453B2 Method and system for creation of binary spatial filters 有权
用于创建二进制空间滤波器的方法和系统

Method and system for creation of binary spatial filters
Abstract:
Methods and systems for designing a binary spatial filter based on data indicative of a desired exposure condition to be emulated by an inspection system, and for implementing the binary spatial filter in an optical path of the inspection system, thereby enabling emulation of the desired exposure condition by interacting a light beam of the inspection system with the binary spatial filter. The present method and systems enable on-the-fly and on-demand design and implementation/generation of spatial filters for use in inspection systems.
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