Invention Grant
- Patent Title: Method and system for creation of binary spatial filters
- Patent Title (中): 用于创建二进制空间滤波器的方法和系统
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Application No.: US13536625Application Date: 2012-06-28
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Publication No.: US08984453B2Publication Date: 2015-03-17
- Inventor: Shmuel Mangan , Amir Sagiv , Mariano Abramson
- Applicant: Shmuel Mangan , Amir Sagiv , Mariano Abramson
- Applicant Address: IL Rehovot
- Assignee: Applied Materials Israel, Ltd.
- Current Assignee: Applied Materials Israel, Ltd.
- Current Assignee Address: IL Rehovot
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G01N21/00 ; G03F1/84 ; G03F7/20

Abstract:
Methods and systems for designing a binary spatial filter based on data indicative of a desired exposure condition to be emulated by an inspection system, and for implementing the binary spatial filter in an optical path of the inspection system, thereby enabling emulation of the desired exposure condition by interacting a light beam of the inspection system with the binary spatial filter. The present method and systems enable on-the-fly and on-demand design and implementation/generation of spatial filters for use in inspection systems.
Public/Granted literature
- US20140007025A1 METHOD AND SYSTEM FOR CREATION OF BINARY SPATIAL FILTERS Public/Granted day:2014-01-02
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