Invention Grant
US08985747B2 Piezoelectric element, liquid ejecting head, liquid ejecting apparatus and piezoelectric device 有权
压电元件,液体喷射头,液体喷射装置和压电装置

Piezoelectric element, liquid ejecting head, liquid ejecting apparatus and piezoelectric device
Abstract:
Provided is a piezoelectric element that has a first electrode, a piezoelectric layer provided on the first electrode, and a second electrode provided on the piezoelectric layer, an average grain size of crystal grains aligned in a planar direction within 15° from a (100) plane is less than the average grain size of the crystal grains facing a planar direction inclined by more than 15° from the (100) plane, in a case in which the crystal orientation of the piezoelectric layer is analyzed using an electron beam backscatter diffraction method (EBSD).
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