Invention Grant
- Patent Title: Piezoelectric element, liquid ejecting head, liquid ejecting apparatus and piezoelectric device
- Patent Title (中): 压电元件,液体喷射头,液体喷射装置和压电装置
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Application No.: US14464170Application Date: 2014-08-20
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Publication No.: US08985747B2Publication Date: 2015-03-24
- Inventor: Tomohiro Sakai , Tatsushi Kato
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Workman Nydegger
- Priority: JP2013-172617 20130822
- Main IPC: B41J2/045
- IPC: B41J2/045 ; H01L41/187 ; H01L41/047 ; B41J2/14

Abstract:
Provided is a piezoelectric element that has a first electrode, a piezoelectric layer provided on the first electrode, and a second electrode provided on the piezoelectric layer, an average grain size of crystal grains aligned in a planar direction within 15° from a (100) plane is less than the average grain size of the crystal grains facing a planar direction inclined by more than 15° from the (100) plane, in a case in which the crystal orientation of the piezoelectric layer is analyzed using an electron beam backscatter diffraction method (EBSD).
Public/Granted literature
- US20150054888A1 PIEZOELECTRIC ELEMENT, LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS AND PIEZOELECTRIC DEVICE Public/Granted day:2015-02-26
Information query
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