Invention Grant
US08986496B2 Device and method for stripping a product substrate from a carrier substrate
有权
用于从载体衬底剥离产品衬底的装置和方法
- Patent Title: Device and method for stripping a product substrate from a carrier substrate
- Patent Title (中): 用于从载体衬底剥离产品衬底的装置和方法
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Application No.: US14013145Application Date: 2013-08-29
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Publication No.: US08986496B2Publication Date: 2015-03-24
- Inventor: Friedrich Paul Lindner , Jurgen Burggraf
- Applicant: EV Group GmbH
- Applicant Address: AT St. Florian am Inn
- Assignee: EV Group GmbH
- Current Assignee: EV Group GmbH
- Current Assignee Address: AT St. Florian am Inn
- Agency: Kusner & Jaffe
- Priority: EP09011198 20090901
- Main IPC: B32B38/10
- IPC: B32B38/10 ; B32B43/00 ; H01L21/683 ; H01L21/67

Abstract:
Device for stripping a product substrate from a carrier substrate connected to the product substrate by an interconnect layer by means of a flexible film that is mounted on a film frame and that comprises an adhesive layer for holding the product substrate in a bonding surface section of the film, the film being mounted on the film frame in an attachment section of the film that surrounds the bonding surface section, and the film comprising a stripping section that is located between the bonding surface section and the attachment section, the device having stripping means for effecting a stripping of the product substrate from the carrier substrate from a periphery of the product substrate.
Public/Granted literature
- US20130340947A1 DEVICE AND METHOD FOR STRIPPING A PRODUCT SUBSTRATE FROM A CARRIER SUBSTRATE Public/Granted day:2013-12-26
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