Invention Grant
- Patent Title: Method of forming thin film from multiple deposition sources
- Patent Title (中): 从多个沉积源形成薄膜的方法
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Application No.: US12926587Application Date: 2010-11-29
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Publication No.: US08986783B2Publication Date: 2015-03-24
- Inventor: Suk-Won Jung , Seung-Ho Choi , Kang-Il Lee , Hyun-Keun Song , Cheol-Lae Roh
- Applicant: Suk-Won Jung , Seung-Ho Choi , Kang-Il Lee , Hyun-Keun Song , Cheol-Lae Roh
- Applicant Address: KR Yongin, Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin, Gyeonggi-Do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2009-0116421 20091130
- Main IPC: C23C16/448
- IPC: C23C16/448 ; C23C14/24 ; H01L51/00 ; H01L51/56

Abstract:
A method of depositing a material on a substrate is provided for use in manufacturing electronic and display devices such as semiconductors, liquid crystal displays, and organic light emitting diode displays. A deposition material stored in a first deposition source section is heated to evaporate the deposition material. A second deposition source section, which is separate from the first deposition source section, is cooled. The first deposition source section is cooled, and deposition material stored in a second deposition source section is heated so as to alternately supply evaporated deposition material from the first and second deposition source sections to a feed section. The evaporated deposition material from the feed section is supplied to a nozzle section. A substrate can be provided to receive the evaporated deposition material from the nozzle section. A thin film of deposition material can then be formed on the substrate.
Public/Granted literature
- US20110129595A1 Deposition source, deposition apparatus having the same, and method of forming thin film Public/Granted day:2011-06-02
Information query
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