Invention Grant
US08986794B2 Vapor deposition apparatus and method of manufacturing organic light-emitting display apparatus 有权
蒸镀装置及制造有机发光显示装置的方法

Vapor deposition apparatus and method of manufacturing organic light-emitting display apparatus
Abstract:
A vapor deposition apparatus efficiently performs a deposition process to form a thin film with improved characteristics on a substrate, and a method manufactures an organic light-emitting display apparatus by using such vapor deposition apparatus. The vapor deposition apparatus includes a body including an upper member and a lateral member coupled to the upper member; a receiving portion disposed to face one side of the lateral member; a stage disposed in the receiving portion and supporting the substrate; a plurality of first injection portions disposed in the lateral member and injecting at least one gas into a space between the lateral member and the upper member; a second injection portion disposed in the upper member and injecting at least one gas into the space between the lateral member and the upper member; and a plasma generating portion including a coil and a power source connected to the coil.
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