Invention Grant
- Patent Title: Vapor deposition apparatus and method of manufacturing organic light-emitting display apparatus
- Patent Title (中): 蒸镀装置及制造有机发光显示装置的方法
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Application No.: US13607534Application Date: 2012-09-07
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Publication No.: US08986794B2Publication Date: 2015-03-24
- Inventor: Sang-Joon Seo , Jae-Eung Oh
- Applicant: Sang-Joon Seo , Jae-Eung Oh
- Applicant Address: KR Giheung-Gu, Yongin, Gyeonggi-Do KR Sangnok-Gu, Ansan-Si, Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.,Industry-University Cooperation Foundation Hanyang University Erica Campus
- Current Assignee: Samsung Display Co., Ltd.,Industry-University Cooperation Foundation Hanyang University Erica Campus
- Current Assignee Address: KR Giheung-Gu, Yongin, Gyeonggi-Do KR Sangnok-Gu, Ansan-Si, Gyeonggi-Do
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2011-0112877 20111101
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H05B33/10 ; C23C16/44 ; C23C16/455 ; C23C16/54 ; H01L51/56

Abstract:
A vapor deposition apparatus efficiently performs a deposition process to form a thin film with improved characteristics on a substrate, and a method manufactures an organic light-emitting display apparatus by using such vapor deposition apparatus. The vapor deposition apparatus includes a body including an upper member and a lateral member coupled to the upper member; a receiving portion disposed to face one side of the lateral member; a stage disposed in the receiving portion and supporting the substrate; a plurality of first injection portions disposed in the lateral member and injecting at least one gas into a space between the lateral member and the upper member; a second injection portion disposed in the upper member and injecting at least one gas into the space between the lateral member and the upper member; and a plasma generating portion including a coil and a power source connected to the coil.
Public/Granted literature
- US20130108778A1 VAPOR DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS Public/Granted day:2013-05-02
Information query
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