Invention Grant
- Patent Title: Growth process for gallium nitride porous nanorods
- Patent Title (中): 氮化镓多孔纳米棒的生长过程
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Application No.: US13080165Application Date: 2011-04-05
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Publication No.: US08986835B2Publication Date: 2015-03-24
- Inventor: Isaac Harshman Wildeson , Timothy David Sands
- Applicant: Isaac Harshman Wildeson , Timothy David Sands
- Applicant Address: US IN West Lafayette
- Assignee: Purdue Research Foundation
- Current Assignee: Purdue Research Foundation
- Current Assignee Address: US IN West Lafayette
- Agency: Brannon Sowers & Cracraft PC
- Agent C. John Brannon
- Main IPC: C30B25/04
- IPC: C30B25/04 ; C03C25/22 ; D02G3/22 ; B82Y40/00 ; B82Y30/00 ; C30B29/40 ; C30B29/66 ; C30B29/38

Abstract:
A GaN nanorod and formation method. Formation includes providing a substrate having a GaN film, depositing SiNx on the GaN film, etching a growth opening through the SiNx and into the GaN film, growing a GaN nanorod through the growth opening, the nanorod having a nanopore running substantially through its centerline. Focused ion beam etching can be used. The growing can be done using organometallic vapor phase epitaxy. The nanopore diameter can be controlled using the growth opening diameter or the growing step duration. The GaN nanorods can be removed from the substrate. The SiNx layer can be removed after the growing step. A SiOx template can be formed on the GaN film and the GaN can be grown to cover the SiOx template before depositing SiNx on the GaN film. The SiOx template can be removed after growing the nanorods.
Public/Granted literature
- US20110244235A1 GROWTH PROCESS FOR GALLIUM NITRIDE POROUS NANORODS Public/Granted day:2011-10-06
Information query
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