Invention Grant
US08987074B2 Oxide semiconductor thin film transistor, manufacturing method, and display device thereof
有权
氧化物半导体薄膜晶体管,制造方法及其显示装置
- Patent Title: Oxide semiconductor thin film transistor, manufacturing method, and display device thereof
- Patent Title (中): 氧化物半导体薄膜晶体管,制造方法及其显示装置
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Application No.: US13983868Application Date: 2013-02-27
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Publication No.: US08987074B2Publication Date: 2015-03-24
- Inventor: Zhenyu Xie , Shaoying Xu , Changjiang Yan , Tiansheng Li
- Applicant: Beijing BOE Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: Beijing BOE Optoelectronics Technology Co., Ltd.
- Current Assignee: Beijing BOE Optoelectronics Technology Co., Ltd.
- Current Assignee Address: CN Beijing
- Priority: CN201220069853U 20120228
- International Application: PCT/CN2013/071939 WO 20130227
- International Announcement: WO2013/127337 WO 20130906
- Main IPC: H01L21/84
- IPC: H01L21/84 ; H01L27/14

Abstract:
An oxide semiconductor thin film transistor, a manufacturing method and a display device thereof are disclosed. An oxide semiconductor thin film transistor comprises a gate insulating layer (22), an oxide semiconductor layer (24) and a blocking layer (25), wherein a first transition layer (23) is formed between the gate insulating layer (22) and the oxide semiconductor layer (24), the oxygen content of the first transition layer (23) is higher than the oxygen content of the oxide semiconductor layer (24). The oxide semiconductor thin film transistor enhances the interface characteristic and the lattice matching between the oxide semiconductor layer (24) and the blocking layer (25) to improve the stability of the thin film transistor better.
Public/Granted literature
- US20140103334A1 Oxide Semiconductor Thin Film Transistor, Manufacturing Method, And Display Device Thereof Public/Granted day:2014-04-17
Information query
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