Invention Grant
- Patent Title: Bonded semiconductor structures and method of forming same
- Patent Title (中): 结合半导体结构及其形成方法
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Application No.: US13637565Application Date: 2011-02-22
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Publication No.: US08987114B2Publication Date: 2015-03-24
- Inventor: Carlos Mazure , Bich-Yen Nguyen , Mariam Sadaka
- Applicant: Carlos Mazure , Bich-Yen Nguyen , Mariam Sadaka
- Applicant Address: FR Bernin
- Assignee: SOITEC
- Current Assignee: SOITEC
- Current Assignee Address: FR Bernin
- Agency: TraskBritt
- International Application: PCT/US2011/025647 WO 20110222
- International Announcement: WO2011/123199 WO 20111006
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/06 ; H01L21/18 ; H01L21/822 ; H01L21/02

Abstract:
Methods of forming semiconductor structures include transferring a portion (116a) of a donor structure to a processed semiconductor structure (102) that includes at least one non-planar surface. An amorphous film (144) may be formed over at least one non-planar surface of the bonded semiconductor structure, and the amorphous film may be planarized to form one or more planarized surfaces. Semiconductor structures include a bonded semiconductor structure having at least one non-planar surface, and an amorphous film disposed over the at least one non-planar surface. The bonded semiconductor structure may include a processed semiconductor structure and a portion of a single crystal donor structure attached to a non-planar surface of the processed semiconductor structure.
Public/Granted literature
- US20130015442A1 BONDED SEMICONDUCTOR STRUCTURES AND METHOD OF FORMING SAME Public/Granted day:2013-01-17
Information query
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