Invention Grant
- Patent Title: Identification information setting device and identification information setting method
- Patent Title (中): 识别信息设定装置及识别信息设定方法
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Application No.: US13273190Application Date: 2011-10-13
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Publication No.: US08989889B2Publication Date: 2015-03-24
- Inventor: Hirohito Kobayashi
- Applicant: Hirohito Kobayashi
- Applicant Address: JP Kanagawa
- Assignee: Canon Anelva Corporation
- Current Assignee: Canon Anelva Corporation
- Current Assignee Address: JP Kanagawa
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2009-109290 20090428
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/67
Abstract:
The present invention provides an identification information setting device and an identification information setting method that can easily set identification information for a transfer chamber. In an embodiment of the present invention, a storage portion (31) stores field identification information that is previously set for each position where a transfer chamber having a transfer robot can be arranged. A reception portion (32) receives, as specification information, information on the position where the transfer chamber is actually arranged and the transfer chamber. The storage portion (31) stores correspondence between the actually arranged transfer chamber and identification information.
Public/Granted literature
- US20120089243A1 IDENTIFICATION INFORMATION SETTING DEVICE AND IDENTIFICATION INFORMATION SETTING METHOD Public/Granted day:2012-04-12
Information query
IPC分类:
