Invention Grant
- Patent Title: Apparatus and method for making fiducials on a substrate
- Patent Title (中): 在基板上制作基准的装置和方法
-
Application No.: US13130610Application Date: 2009-12-09
-
Publication No.: US08992104B2Publication Date: 2015-03-31
- Inventor: Daniel H. Carlson , Daniel J. Theis , Brian K. Nelson
- Applicant: Daniel H. Carlson , Daniel J. Theis , Brian K. Nelson
- Applicant Address: US MN St. Paul
- Assignee: 3M Innovative Properties Company
- Current Assignee: 3M Innovative Properties Company
- Current Assignee Address: US MN St. Paul
- Agent Yufeng Dong; Scott A. Baum; Steven E. Skolnick
- International Application: PCT/US2009/067273 WO 20091209
- International Announcement: WO2010/077719 WO 20100708
- Main IPC: B41J11/46
- IPC: B41J11/46 ; H05K1/02 ; B41J3/54 ; H05K3/00

Abstract:
Fiducials having substantially continuous portions made on a substrate allow the position of the substrate to be determined. An approach for making fiducials involves moving first and second fiducial devices together back and forth across the substrate along a trajectory having a component along the lateral axis of the substrate while the substrate and the first and second fiducial devices are in relative motion along the longitudinal axis of the substrate. The first fiducial device operates to make one fiducial on the substrate during the movement along the trajectory and the relative motion. The second fiducial device operates to make another fiducial on the substrate during the movement along the trajectory and the relative motion. The fiducials may be formed so that they have a constant spatial frequency with the first fiducial being out of phase with respect to the second fiducial.
Public/Granted literature
- US20110247511A1 Apparatus and Method for Making Fiducials on a Substrate Public/Granted day:2011-10-13
Information query
IPC分类: