Invention Grant
- Patent Title: Method and apparatus of tuning a scanning probe microscope
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Application No.: US13674774Application Date: 2012-11-12
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Publication No.: US08997259B2Publication Date: 2015-03-31
- Inventor: Chanmin Su , Paul Silva , Lin Huang , Bede Pittenger , Shuiqing Hu
- Applicant: Bruker Nano, Inc.
- Applicant Address: US CA Santa Barbara
- Assignee: Bruker Nano, Inc.
- Current Assignee: Bruker Nano, Inc.
- Current Assignee Address: US CA Santa Barbara
- Agency: Boyle Fredrickson S.C.
- Main IPC: G01Q30/10
- IPC: G01Q30/10 ; G01Q30/00 ; G01Q30/04 ; B82Y35/00 ; G01Q60/34
Abstract:
An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve.
Public/Granted literature
- US20130125269A1 Method And Apparatus Of Tuning A Scanning Probe Microscope Public/Granted day:2013-05-16
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