Invention Grant
US08997575B2 Method and apparatus for damping diaphragm vibration in capacitance diaphragm gauges 有权
用于阻尼电容隔膜计的隔膜振动的方法和装置

  • Patent Title: Method and apparatus for damping diaphragm vibration in capacitance diaphragm gauges
  • Patent Title (中): 用于阻尼电容隔膜计的隔膜振动的方法和装置
  • Application No.: US14106700
    Application Date: 2013-12-13
  • Publication No.: US08997575B2
    Publication Date: 2015-04-07
  • Inventor: Robert J. Ferran
  • Applicant: Reno Technologies, Inc.
  • Applicant Address: US DE Wilmington
  • Assignee: Reno Technologies, Inc.
  • Current Assignee: Reno Technologies, Inc.
  • Current Assignee Address: US DE Wilmington
  • Agent Jerry Turner Sewell
  • Main IPC: G01L9/12
  • IPC: G01L9/12
Method and apparatus for damping diaphragm vibration in capacitance diaphragm gauges
Abstract:
A system and method mitigate the effects of these external vibrations on a capacitance diaphragm gauge by sensing the motion of the diaphragm at the first natural frequency of the diaphragm of the CDG. The presence of the natural frequency signals superimposed on the pressure signal is determined by sensing variations in the output of a sensor at or near the known natural frequency of the diaphragm and filtering that known low frequency from the output. The filtered signal is used in a feedback circuit to impose electrostatic forces on the diaphragm. The imposed electrostatic forces oppose the motion created by the external vibration to suppress the effects of the vibration on the pressure measured by the CDG.
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