Invention Grant
- Patent Title: System for and method of fast pulse gas delivery
- Patent Title (中): 快速脉冲气体输送系统及方法
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Application No.: US12893554Application Date: 2010-09-29
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Publication No.: US08997686B2Publication Date: 2015-04-07
- Inventor: Junhua Ding
- Applicant: Junhua Ding
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: McDermot Will & Emery LLP
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/52 ; C23F1/00 ; H01L21/306 ; C23C16/448 ; G05D7/06 ; C23C16/06 ; C23C16/22

Abstract:
A system for and method of delivering pulses of a desired mass of gas to a tool is described. A system for delivering pulses of a desired mass of gas to a process chamber or tool, comprising: a gas delivery chamber; a first valve arranged so as to control the flow of gas into the gas delivery chamber; a second valve arranged so as control the flow of gas leaving the gas delivery chamber so that the gas can leave the gas delivery chamber in pulses, each of a selected mass as a function of the initial pressure of the gas in the gas delivery chamber and the duration of the respective pulse; and a pressure control arrangement configured and arranged so as to control the flow of gas into the gas delivery chamber so as to precharge the gas in the gas delivery chamber to an initial pressure set point prior to delivering the pulses of gas such that the variance of the starting pressure of the gas in the gas delivery chamber is controlled prior to delivering the pulses of gas, and the repeatability of the mass delivery is improved as a function of the duration of each of the pulses.
Public/Granted literature
- US20120073672A1 SYSTEM FOR AND METHOD OF FAST PULSE GAS DELIVERY Public/Granted day:2012-03-29
Information query
IPC分类: