Invention Grant
- Patent Title: Multiple-channel flow ratio controller
- Patent Title (中): 多通道流量比控制器
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Application No.: US11279786Application Date: 2006-04-14
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Publication No.: US08997791B2Publication Date: 2015-04-07
- Inventor: Michael L'Bassi , Junhua Ding , David D'Entremont
- Applicant: Michael L'Bassi , Junhua Ding , David D'Entremont
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: McDermott Will and Emery LLP
- Main IPC: F16K11/20
- IPC: F16K11/20 ; G05D7/06

Abstract:
A system for dividing a single mass flow into a plurality N of secondary flows includes an inlet configured to receive the single mass flow, a master FRC (flow ratio controller), and one or more slave FRCs. Each FRC is connected to the inlet and including at least one flow channel. The master FRC and the slave FRCs include in combination a total of N flow channels. Each flow channel i (i=1, . . . , N) is connected to carry a corresponding one of the N secondary flows. In response to preselected ratio setpoints received from a host controller, the master FRC and the slave FRCs maintain ratios Qi/QT (i=1, . . . , N) between individual flow rates Qi (i=1, . . . , N) and a total flow rate QT at the preselected ratio set points.
Public/Granted literature
- US20070240778A1 Multiple-Channel Flow Ratio Controller Public/Granted day:2007-10-18
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