Invention Grant
- Patent Title: Removal apparatuses for semiconductor chips
- Patent Title (中): 半导体芯片去除装置
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Application No.: US13527777Application Date: 2012-06-20
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Publication No.: US08998068B2Publication Date: 2015-04-07
- Inventor: JaeYong Park , Junyoung Ko , Whasu Sin , Kyhyun Jung
- Applicant: JaeYong Park , Junyoung Ko , Whasu Sin , Kyhyun Jung
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Harness, Dickey & Pierce, PLC
- Priority: KR10-2011-0066942 20110706
- Main IPC: B23K1/018
- IPC: B23K1/018 ; B23P19/00 ; B23K1/00 ; B23K1/005 ; H01L23/00 ; H05K13/04

Abstract:
A removal apparatus for a semiconductor chip may include a stage configured to support a board on which the semiconductor chip is mounted by bumps, a laser configured to irradiate a laser beam into the board over an area larger than the semiconductor chip, and a picker configured to cause the laser beam to penetrate the semiconductor chip locally and to separate the semiconductor chip from the board. A method of removing a semiconductor chip from a board may include loading the board, on which the semiconductor chip is mounted by bumps, on a stage; irradiating a laser beam into the semiconductor chip to melt the bumps and to separate the semiconductor chip from the board; continuously irradiating the laser beam into the board on which solder pillars, that are residues of the bumps, remain to melt the solder pillars; and removing the solder pillars.
Public/Granted literature
- US20130008020A1 REMOVAL APPARATUSES FOR SEMICONDUCTOR CHIPS AND METHODS OF REMOVING SEMICONDUCTOR CHIPS Public/Granted day:2013-01-10
Information query
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