Invention Grant
US08998390B2 Piezoelectric film, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element
有权
压电膜,喷墨头,通过喷墨头形成图像的方法,角速度传感器,角速度传感器测量角速度的方法,压电发生元件以及使用压电发生元件产生电力的方法
- Patent Title: Piezoelectric film, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element
- Patent Title (中): 压电膜,喷墨头,通过喷墨头形成图像的方法,角速度传感器,角速度传感器测量角速度的方法,压电发生元件以及使用压电发生元件产生电力的方法
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Application No.: US14026991Application Date: 2013-09-13
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Publication No.: US08998390B2Publication Date: 2015-04-07
- Inventor: Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
- Applicant: Panasonic Corporation
- Applicant Address: JP Osaka
- Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2012-048760 20120306; JP2012-048762 20120306; JP2012-167968 20120730
- Main IPC: B41J2/045
- IPC: B41J2/045 ; H02N2/00 ; H01L41/187 ; B41J2/14 ; H01L41/047 ; H01L41/08 ; H01L41/319 ; G01C19/56 ; H01L41/113 ; G01C19/5769

Abstract:
Provided is an NBT-BT lead-free piezoelectric film having a high crystalline orientation and a high piezoelectric constant. The present invention is a piezoelectric film comprising a NaxM1-x layer and a (Bi, Na)TiO3—BaTiO3 layer. The (Bi, Na) TiO3—BaTiO3 layer is formed on the NaxM1-x layer, where M represents Pt, Ir, or PtIr and x represents a value of not less than 0.002 and not more than 0.02. Both of the NaxM1-x layer and the (Bi, Na) TiO3—BaTiO3 layer have a (001) orientation only, a (110) orientation only, or a (111) orientation only.
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