Invention Grant
US08999028B2 Apparatus and method for collecting powder generated during film deposition process
有权
用于收集在膜沉积过程中产生的粉末的装置和方法
- Patent Title: Apparatus and method for collecting powder generated during film deposition process
- Patent Title (中): 用于收集在膜沉积过程中产生的粉末的装置和方法
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Application No.: US13924396Application Date: 2013-06-21
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Publication No.: US08999028B2Publication Date: 2015-04-07
- Inventor: Xianping Meng , Bingfu Chen , Licheng Hu
- Applicant: Macronix International Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Alston & Bird LLP
- Main IPC: B01D50/00
- IPC: B01D50/00 ; C23C16/34 ; C23C16/44

Abstract:
An apparatus for controlling a flow of gas comprises a spiral path guiding member. The spiral path guiding member comprises at least two groups of guiding plates. Each guiding plate of each group is disposed in an axial direction to form a longitudinal axis. Each group is spaced apart in the longitudinal direction. A surface of each guiding plate is substantially parallel to the longitudinal axis. At least one guiding plate of each group has a guiding plate opening. Guiding plate openings of the guiding plates may facilitate gas to flow in a spiral flow path.
Public/Granted literature
- US20140261702A1 APPARATUS AND METHOD FOR COLLECTING POWDER GENERATED DURING FILM DEPOSITION PROCESS Public/Granted day:2014-09-18
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