Invention Grant
US08999028B2 Apparatus and method for collecting powder generated during film deposition process 有权
用于收集在膜沉积过程中产生的粉末的装置和方法

Apparatus and method for collecting powder generated during film deposition process
Abstract:
An apparatus for controlling a flow of gas comprises a spiral path guiding member. The spiral path guiding member comprises at least two groups of guiding plates. Each guiding plate of each group is disposed in an axial direction to form a longitudinal axis. Each group is spaced apart in the longitudinal direction. A surface of each guiding plate is substantially parallel to the longitudinal axis. At least one guiding plate of each group has a guiding plate opening. Guiding plate openings of the guiding plates may facilitate gas to flow in a spiral flow path.
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