Invention Grant
- Patent Title: Film depositing apparatus
- Patent Title (中): 胶片沉积装置
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Application No.: US12404022Application Date: 2009-03-13
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Publication No.: US08999062B2Publication Date: 2015-04-07
- Inventor: Tatsuya Fujinami , Toshiya Takahashi
- Applicant: Tatsuya Fujinami , Toshiya Takahashi
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2008-065592 20080314
- Main IPC: C23C16/503
- IPC: C23C16/503 ; C23C16/54 ; C23C16/509 ; C23C16/44 ; C23C16/455

Abstract:
A film depositing apparatus comprises: a rotatable drum within a chamber around which a substrate is wrapped in a specified surface region; a film depositing unit comprising a film depositing electrode spaced facing to a surface of the drum, and a feed gas supply section supplying a feed gas for forming a film into a gap between the drum and the film depositing electrode; and an exhaust unit that exhausts the gap between the drum and the film depositing electrode during film formation by the film depositing unit so as to forcibly discharge the feed gas, supplied into the gap by the feed gas supply section, through at least one of end portions of the gap upstream side and downstream side in a rotating direction of the drum uniformly over an entire region of the gap in a direction parallel to the axis of rotation of the drum.
Public/Granted literature
- US20090229520A1 FILM DEPOSITING APPARATUS Public/Granted day:2009-09-17
Information query
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