Invention Grant
- Patent Title: Apparatus for forming thin film
- Patent Title (中): 用于形成薄膜的装置
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Application No.: US13179463Application Date: 2011-07-08
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Publication No.: US08999064B2Publication Date: 2015-04-07
- Inventor: Sang-Woo Lee
- Applicant: Sang-Woo Lee
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Christie, Parker & Hale, LLP
- Priority: KR10-2010-0074723 20100802
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C14/24 ; C23C14/12

Abstract:
A thin film forming apparatus according to the embodiment includes a plurality of vapor deposition sources respectively separated from each other, a plurality of nozzle bodies connected to upper portions of the respective vapor deposition sources, and a plurality of nozzles connected to upper portions of the respective nozzle bodies. A nozzle hole of each of the nozzles is formed on a same vapor deposition line. Thus, according to the embodiment, the first organic material and the second organic material respectively sprayed through a first nozzle hole and a second nozzle hole can be uniformly mixed by disposing the first nozzle hole and the second nozzle on the same vapor deposition line.
Public/Granted literature
- US20120024228A1 APPARATUS FOR FORMING THIN FILM Public/Granted day:2012-02-02
Information query
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