Invention Grant
- Patent Title: Sputtering apparatus
- Patent Title (中): 溅射装置
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Application No.: US13116492Application Date: 2011-05-26
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Publication No.: US08999121B2Publication Date: 2015-04-07
- Inventor: Kyosuke Sugi , Tetsuya Endo , Einstein Noel Abarra
- Applicant: Kyosuke Sugi , Tetsuya Endo , Einstein Noel Abarra
- Applicant Address: JP Kawasaki-shi
- Assignee: Canon Anelva Corporation
- Current Assignee: Canon Anelva Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Fitzpatrick, Cella, Herper & Scinto
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C14/22 ; C23C14/50 ; H01J37/32 ; H01J37/34

Abstract:
The present invention provides a sputtering apparatus and a film-forming method capable of forming a magnetic film having a reduced variation in the orientation of the magnetic anisotropy. The sputtering apparatus of the present invention is equipped with a rotatable cathode and a rotatable stage. The stage can have an electrostatic chuck. Moreover, the stage may electrically be connected with a bias power source capable of applying a bias voltage to the stage. Furthermore, the stage may have the electrostatic chuck and electrically be connected with the bias power source.
Public/Granted literature
- US20110272278A1 SPUTTERING APPARATUS Public/Granted day:2011-11-10
Information query
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