Invention Grant
US08999122B2 Insulator interposed type plasma processing apparatus 有权
绝缘子插入式等离子体处理装置

  • Patent Title: Insulator interposed type plasma processing apparatus
  • Patent Title (中): 绝缘子插入式等离子体处理装置
  • Application No.: US13122392
    Application Date: 2010-02-10
  • Publication No.: US08999122B2
    Publication Date: 2015-04-07
  • Inventor: Yuichi Shiina
  • Applicant: Yuichi Shiina
  • Applicant Address: JP Tokyo
  • Assignee: Ferrotec Corporation
  • Current Assignee: Ferrotec Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: DLA Piper LLP (US)
  • Priority: JP2009-085845 20090331
  • International Application: PCT/JP2010/051936 WO 20100210
  • International Announcement: WO2010/113544 WO 20101007
  • Main IPC: C23C14/00
  • IPC: C23C14/00 H01J37/32
Insulator interposed type plasma processing apparatus
Abstract:
Electrically charged droplets and neutral droplets mixed with plasma are removed with better efficiency, and an improvement in the surface treatment precision of film formation by high purity plasma is sought.In a plasma processing apparatus including plasma generating portion A, plasma transport tube B and plasma processing portion C, an insulator interposed plasma processing apparatus is constituted in which plasma transport tube B is made electrically independent from plasma generating portion A and plasma processing portion C electrically by interposing insulator IS and insulator IF between the starting end side and the finishing end side of the plasma transport tube. Plasma transport tube B is divided into multiple small transport tubes B01, B23 through intermediate insulator II1, and each small transport tube is made independent electrically. The electric potential of the plasma transport tube or the small transport tubes is set to GND, a variable positive electric potential, or a variable negative electric potential, by putting the plasma transport tube or the multiple small transport tubes in an electric floating state, or connecting bias power supplies EB 01, EB 23 for transport tube. Also, the small transport tubes are connected in a bent manner, and droplets are removed by the geometric structure.
Public/Granted literature
Information query
Patent Agency Ranking
0/0