Invention Grant
- Patent Title: Selectively etching of a polymer matrix on pet
- Patent Title (中): 选择性地蚀刻宠物上的聚合物基质
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Application No.: US14114401Application Date: 2012-03-28
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Publication No.: US08999186B2Publication Date: 2015-04-07
- Inventor: Arjan Meijer , Werner Stockum , Ingo Koehler
- Applicant: Arjan Meijer , Werner Stockum , Ingo Koehler
- Applicant Address: DE Darmstadt
- Assignee: Merck Patent GmbH
- Current Assignee: Merck Patent GmbH
- Current Assignee Address: DE Darmstadt
- Agency: Millen, White, Zelano & Branigan, P.C.
- Priority: EP11003480 20110428
- International Application: PCT/EP2012/001364 WO 20120328
- International Announcement: WO2012/146339 WO 20121101
- Main IPC: B44C1/22
- IPC: B44C1/22 ; C09K13/02 ; B81C1/00 ; B82Y10/00 ; B82Y40/00 ; G03F7/00 ; G03F7/20 ; H01L51/00
Abstract:
The present invention relates to a method for selectively etching and patterning with high resolution of flexible polymer matrices, which may comprise Ag nano tubes.
Public/Granted literature
- US20140054260A1 SELECTIVELY ETCHING OF A POLYMER MATRIX ON PET Public/Granted day:2014-02-27
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