Invention Grant
- Patent Title: Method and apparatus for fabricating or altering microstructures using local chemical alterations
- Patent Title (中): 使用局部化学改变制造或改变微结构的方法和装置
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Application No.: US13447982Application Date: 2012-04-16
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Publication No.: US08999458B2Publication Date: 2015-04-07
- Inventor: Supratik Guha , Hendrik F. Hamann , Herschel M. Marchman , Robert J. Von Gutfeld
- Applicant: Supratik Guha , Hendrik F. Hamann , Herschel M. Marchman , Robert J. Von Gutfeld
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Vazken Alexanian
- Main IPC: C23C8/00
- IPC: C23C8/00 ; H01L21/768 ; H01L21/311 ; H01L21/3213 ; H01L29/66 ; H01L29/786
Abstract:
A method and apparatus for fabricating or altering a microstructure use means for heating to facilitate a local chemical reaction that forms or alters the submicrostructure.
Public/Granted literature
- US20120201956A1 METHOD AND APPARATUS FOR FABRICATING OR ALTERING MICROSTRUCTURES USING LOCAL CHEMICAL ALTERATIONS Public/Granted day:2012-08-09
Information query
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