Invention Grant
- Patent Title: Polycrystalline silicon rod and process for production thereof
- Patent Title (中): 多晶硅棒及其制造方法
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Application No.: US13886439Application Date: 2013-05-03
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Publication No.: US08999516B2Publication Date: 2015-04-07
- Inventor: Martin Weber , Erich Dornberger , Michael Kerscher , Heinz Kraus , Reiner Pech
- Applicant: Wacker Chemie AG
- Applicant Address: DE Munich
- Assignee: Wacker Chemie AG
- Current Assignee: Wacker Chemie AG
- Current Assignee Address: DE Munich
- Agency: Caesar, Rivise, Bernstein, Cohen & Pokotilow, Ltd.
- Priority: DE102012207513 20120507
- Main IPC: B32B5/18
- IPC: B32B5/18 ; B32B9/04 ; B32B13/04 ; C01B33/02 ; C23C16/24 ; C01B33/035 ; C23C16/44
Abstract:
The invention provides a polycrystalline silicon rod having a total diameter of at least 150 mm, including a core A having a porosity of 0 to less than 0.01 around a thin rod, and at least two subsequent regions B and C which differ in porosity by a factor of 1.7 to 23, the outer region C being less porous than region B.
Public/Granted literature
- US20130295408A1 POLYCRYSTALLINE SILICON ROD AND PROCESS FOR PRODUCTION THEREOF Public/Granted day:2013-11-07
Information query
