Invention Grant
- Patent Title: Developable bottom antireflective coating composition and pattern forming method using thereof
- Patent Title (中): 可开发的底部抗反射涂料组合物及其图案形成方法
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Application No.: US13537177Application Date: 2012-06-29
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Publication No.: US08999624B2Publication Date: 2015-04-07
- Inventor: Kuang-Jung Chen , Steven J. Holmes , Wu-Song Huang , Ranee Kwong , Sen Liu
- Applicant: Kuang-Jung Chen , Steven J. Holmes , Wu-Song Huang , Ranee Kwong , Sen Liu
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Steven M. Kellner; Yuanmin Cai; Wenjie Li
- Main IPC: G03F7/11
- IPC: G03F7/11 ; G03F7/004 ; G03F7/039 ; H01L21/027 ; C08L33/06 ; C08F220/26 ; C08L33/16

Abstract:
The present invention relates to a developable bottom antireflective coating (BARC) composition and a pattern forming method using the BARC composition. The BARC composition includes a first polymer having a first carboxylic acid moiety, a hydroxy-containing alicyclic moiety, and a first chromophore moiety; a second polymer having a second carboxylic acid moiety, a hydroxy-containing acyclic moiety, and a second chromophore moiety; a crosslinking agent; and a radiation sensitive acid generator. The first and second chromophore moieties each absorb light at a wavelength from 100 nm to 400 nm. In the patterning forming method, a photoresist layer is formed over a BARC layer of the BARC composition. After exposure, unexposed regions of the photoresist layer and the BARC layer are selectively removed by a developer to form a patterned structure in the photoresist layer. The BARC composition and the pattern forming method are especially useful for implanting levels.
Public/Granted literature
- US20140004712A1 DEVELOPABLE BOTTOM ANTIREFLECTIVE COATING COMPOSITION AND PATTERN FORMING METHOD USING THEREOF Public/Granted day:2014-01-02
Information query
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