Invention Grant
US08999631B2 Primer and pattern forming method for layer including block copolymer
有权
含嵌段共聚物层的底漆和图案形成方法
- Patent Title: Primer and pattern forming method for layer including block copolymer
- Patent Title (中): 含嵌段共聚物层的底漆和图案形成方法
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Application No.: US13820017Application Date: 2011-09-12
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Publication No.: US08999631B2Publication Date: 2015-04-07
- Inventor: Takahiro Senzaki , Takahiro Dazai , Ken Miyagi , Shigenori Fujikawa , Harumi Hayakawa , Mari Koizumi
- Applicant: Takahiro Senzaki , Takahiro Dazai , Ken Miyagi , Shigenori Fujikawa , Harumi Hayakawa , Mari Koizumi
- Applicant Address: JP Kawasaki-shi JP Wako-shi
- Assignee: Tokyo Ohka Kogyo Co., Ltd.,Riken
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.,Riken
- Current Assignee Address: JP Kawasaki-shi JP Wako-shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2010-205875 20100914; JP2010-205890 20100914
- International Application: PCT/JP2011/070729 WO 20110912
- International Announcement: WO2012/036121 WO 20120322
- Main IPC: G03F7/11
- IPC: G03F7/11 ; G03F7/20 ; G03F7/26 ; C08L53/00 ; C09D161/06 ; G03F7/00 ; C09D125/14 ; G03F7/075 ; C08K5/42 ; C08K5/45

Abstract:
An undercoat agent usable in phase separation of a layer formed on a substrate, the layer containing a block copolymer having a plurality of polymers bonded, the undercoat agent including a resin component, and 20 mol % to 80 mol % of all the structural units of the resin component being a structural unit derived from an aromatic ring-containing monomer; and a method of forming a pattern of a layer containing a block copolymer, the method including: step (1) coating the undercoat agent on a substrate (1), thereby forming a layer (2) composed of the undercoat agent, step (2) forming a layer (3) containing a block copolymer having a plurality of polymers bonded on the surface of the layer (2) composed of the undercoat agent, and subjecting the layer (3) containing the block copolymer to phase separation, and step (3) selectively removing a phase (3a) of at least one polymer of the plurality of copolymers constituting the block copolymer from the layer (3) containing the block copolymer.
Public/Granted literature
- US08956810B2 Primer and pattern forming method for layer including block copolymer Public/Granted day:2015-02-17
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