Invention Grant
- Patent Title: Cyclic amino compounds for low-k silylation
- Patent Title (中): 用于低k甲硅烷基化的环状氨基化合物
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Application No.: US12721362Application Date: 2010-03-10
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Publication No.: US08999734B2Publication Date: 2015-04-07
- Inventor: James J. F. McAndrew , Curtis Anderson , Christian Dussarrat
- Applicant: James J. F. McAndrew , Curtis Anderson , Christian Dussarrat
- Applicant Address: US CA Fremont
- Assignee: American Air Liquide, Inc.
- Current Assignee: American Air Liquide, Inc.
- Current Assignee Address: US CA Fremont
- Agent Patricia E. McQueeney; Allen E. White
- Main IPC: H01L21/00
- IPC: H01L21/00 ; C07F7/10 ; H01L21/02
Abstract:
Disclosed herein are mono-functional silylating compounds that may exhibit enhanced silylating capabilities. Also disclosed are method of synthesizing and using these compounds. Finally methods to determine effective silylation are also disclosed.
Public/Granted literature
- US20100233829A1 CYCLIC AMINO COMPOUNDS FOR LOW-K SILYLATION Public/Granted day:2010-09-16
Information query
IPC分类:
