Invention Grant
- Patent Title: Method and apparatus for manufacturing organic el device
- Patent Title (中): 有机EL器件的制造方法和装置
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Application No.: US14115793Application Date: 2012-12-10
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Publication No.: US08999735B2Publication Date: 2015-04-07
- Inventor: Ryohei Kakiuchi , Satoru Yamamoto , Kanako Hida
- Applicant: Nitto Denko Corporation
- Applicant Address: JP Ibaraki-shi
- Assignee: Nitto Denko Corporation
- Current Assignee: Nitto Denko Corporation
- Current Assignee Address: JP Ibaraki-shi
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2011-285561 20111227; JP2012-266748 20121205
- International Application: PCT/JP2012/081975 WO 20121210
- International Announcement: WO2013/099578 WO 20130704
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L51/50 ; H01L51/56 ; H01L51/00 ; C23C14/04 ; C23C14/56

Abstract:
Provided are a method and an apparatus for manufacturing an organic EL device which enable deposition of a vaporized material from an evaporation source onto a substrate in a desired pattern, while eliminating the need for a conventional strip-shaped shadow mask. A shielding portion 51 is configured to be switchable between a shield position where the shielding portion 51 is arranged between an evaporation source 4 and a substrate 81 so as to shield the substrate 81 and a shield release position where the shielding portion 51 is withdrawn from between the evaporation source 4 and the substrate 81 so as to release the shielding of the substrate 81. The shielding portion 51 is switched between the shield position and the shield release position while rotating together with a roller 3.
Public/Granted literature
- US20140084276A1 METHOD AND APPARATUS FOR MANUFACTURING ORGANIC EL DEVICE Public/Granted day:2014-03-27
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