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US08999789B2 Super-junction trench MOSFETs with short terminations 有权
具有短端接的超结沟槽MOSFET

Super-junction trench MOSFETs with short terminations
Abstract:
A super-junction trench MOSFET with a short termination area is disclosed, wherein the short termination area comprising a charge balance region and a channel stop region formed near a top surface of an epitaxial layer with a trenched termination contact penetrating therethrough.
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