Invention Grant
- Patent Title: Nanowire channel field effect device and method for manufacturing the same
- Patent Title (中): 纳米线通道场效应装置及其制造方法
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Application No.: US13236199Application Date: 2011-09-19
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Publication No.: US08999801B2Publication Date: 2015-04-07
- Inventor: Kensuke Ota , Masumi Saitoh , Toshinori Numata
- Applicant: Kensuke Ota , Masumi Saitoh , Toshinori Numata
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2011-60630 20110318
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/10 ; H01L29/06 ; H01L29/66 ; H01L29/78 ; H01L21/265

Abstract:
A semiconductor device according to an embodiment includes: a polycrystalline semiconductor layer formed on an insulating film, the polycrystalline semiconductor layer including a first region and second and third regions each having a greater width than the first region, one of the second and third regions being connected to the first region; a gate insulating film formed at least on side faces of the first region of the polycrystalline semiconductor layer; a gate electrode formed on the gate insulating film; and gate sidewalls made of an insulating material, the gate sidewalls being formed on side faces of the gate electrode on sides of the second and third regions. Content of an impurity per unit volume in the first region is larger than content of the impurity per unit volume in the second and third regions.
Public/Granted literature
- US20120235152A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2012-09-20
Information query
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