Invention Grant
- Patent Title: Focal plane array and method for manufacturing the same
- Patent Title (中): 焦平面阵列及其制造方法
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Application No.: US13582120Application Date: 2011-03-01
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Publication No.: US08999813B2Publication Date: 2015-04-07
- Inventor: Adriana Lapadatu , Gjermund Kittilsland
- Applicant: Adriana Lapadatu , Gjermund Kittilsland
- Applicant Address: NO
- Assignee: SensoNor AS
- Current Assignee: SensoNor AS
- Current Assignee Address: NO
- Agency: Hovey Williams LLP
- Priority: EP10155249 20100302
- International Application: PCT/EP2011/053050 WO 20110301
- International Announcement: WO2011/107487 WO 20110909
- Main IPC: H01L21/30
- IPC: H01L21/30 ; H01L27/146

Abstract:
A method of forming a focal plane array by: forming a first wafer having sensing material provided on a surface, which is covered by a sacrificial layer, the sensing material being a thermistor material defining at least one pixel; providing supporting legs for the pixel within the sacrificial layer, covering them with a further sacrificial layer and forming first conductive portions in the surface of the sacrificial layer that are in contact with the supporting legs; forming a second wafer having read-out integrated circuit (ROIC), the second wafer being covered by another sacrificial layer, into which is formed second conductive portions in contact with the ROIC; bringing the sacrificial oxide layers of the first wafer and second wafer together such that the first and second conductive portions are aligned and bonding them together such that the sensing material is transferred from the first wafer to the second wafer when a sacrificial bulk layer of the first wafer is removed; and removing the sacrificial layers to release the pixel, with the supporting legs underneath it.
Public/Granted literature
- US20130026592A1 FOCAL PLANE ARRAY AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2013-01-31
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