Invention Grant
- Patent Title: Thermal detector, thermal detection device and electronic instrument, and method for manufacturing thermal detector
- Patent Title (中): 热检测器，热检测装置和电子仪器，以及制造热探测器的方法
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Application No.: US13012906Application Date: 2011-01-25
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Publication No.: US09000372B2Publication Date: 2015-04-07
- Inventor: Yasushi Tsuchiya
- Applicant: Yasushi Tsuchiya
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Global IP Counselors, LLP
- Priority: JP2010-014162 20100126
- Main IPC: H01L27/14
- IPC: H01L27/14 ; G01J5/08 ; G01J5/02 ; H01L27/146
Abstract:
A thermal detector includes a substrate, a thermal detection element and a support member. The substrate has a concave portion, a bottom surface of the concave portion forming a light-reflecting curved surface. The thermal detection element includes a light-absorbing film. The support member supports the thermal detection element with a cavity being provided between the substrate and the support member. The light-reflecting curved surface and the light-absorbing film overlap each other in plan view, the light-reflecting curved surface having a projected area in plan view larger than an area of the light-absorbing film.
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