Invention Grant
US09000394B2 Multi-axis magnetic lens for focusing a plurality of charged particle beams
有权
用于聚焦多个带电粒子束的多轴磁性透镜
- Patent Title: Multi-axis magnetic lens for focusing a plurality of charged particle beams
- Patent Title (中): 用于聚焦多个带电粒子束的多轴磁性透镜
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Application No.: US13464261Application Date: 2012-05-04
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Publication No.: US09000394B2Publication Date: 2015-04-07
- Inventor: Weiming Ren , Zhongwei Chen
- Applicant: Weiming Ren , Zhongwei Chen
- Applicant Address: TW Hsinchu
- Assignee: Hermes Microvision, Inc.
- Current Assignee: Hermes Microvision, Inc.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, PC
- Agent Justin King
- Main IPC: H01J37/14
- IPC: H01J37/14

Abstract:
The present invention provides two ways to form a special permeability-discontinuity unit inside every sub-lens of a multi-axis magnetic lens, which either has a simpler configuration or has more flexibility in manufacturing such as material selection and mechanical structure. Accordingly several types of multi-axis magnetic lens are proposed for various applications. One type is for general application such as a multi-axis magnetic condenser lens or a multi-axis magnetic transfer lens, another type is a multi-axis magnetic non-immersion objective which can require a lower magnetomotive force, and one more type is a multi-axis magnetic immersion objective lens which can generate smaller aberrations. Due to using permeability-discontinuity units, every multi-axis magnetic lens in this invention can also be electrically excited to function as a multi-axis electromagnetic compound lens so as to further reduce aberrations thereof and/or realize electron beam retarding for low-voltage irradiation on specimen.
Public/Granted literature
- US20130153782A1 Multi-axis Magnetic Lens for Focusing a Plurality of Charged Particle Beams Public/Granted day:2013-06-20
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