Invention Grant
- Patent Title: Charged particle detectors
- Patent Title (中): 带电粒子探测器
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Application No.: US13277658Application Date: 2011-10-20
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Publication No.: US09000396B2Publication Date: 2015-04-07
- Inventor: Raymond Hill , Shawn McVey , John Notte, IV
- Applicant: Raymond Hill , Shawn McVey , John Notte, IV
- Applicant Address: US NY Thornwood
- Assignee: Carl Zeiss Microscopy, LLC
- Current Assignee: Carl Zeiss Microscopy, LLC
- Current Assignee Address: US NY Thornwood
- Agency: Fish & Richardson P.C.
- Main IPC: G01K1/08
- IPC: G01K1/08 ; H01J43/06 ; H01J37/244

Abstract:
Disclosed are devices, systems, and methods are disclosed that include: (a) a first material layer positioned on a first surface of a support structure and configured to generate secondary electrons in response to incident charged particles that strike the first layer, the first layer including an aperture configured to permit a portion of the incident charged particles to pass through the aperture; and (b) a second material layer positioned on a second surface of the support structure and separated from the first layer by a distance of 0.5 cm or more, the second layer being configured to generate secondary electrons in response to charged particles that pass through the aperture and strike the second layer, where the device is a charged particle detector.
Public/Granted literature
- US20120068068A1 CHARGED PARTICLE DETECTORS Public/Granted day:2012-03-22
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