Invention Grant
- Patent Title: Three dimensional pipe gate nonvolatile memory device
- Patent Title (中): 三维管道非易失性存储器件
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Application No.: US13403065Application Date: 2012-02-23
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Publication No.: US09000509B2Publication Date: 2015-04-07
- Inventor: Ki-Hong Lee , Kwon Hong , Dae-Gyu Shin
- Applicant: Ki-Hong Lee , Kwon Hong , Dae-Gyu Shin
- Applicant Address: KR Gyeonggi-do
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2010-0051427 20100531
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L29/78 ; H01L29/772 ; H01L21/28 ; H01L27/115 ; H01L29/66

Abstract:
A nonvolatile memory device includes a pipe gate having a pipe channel hole; a plurality of interlayer insulation layers and a plurality of gate electrodes alternately stacked over the pipe gate; a pair of columnar cell channels passing through the interlayer insulation layers and the gate electrodes and coupling a pipe channel formed in the pile channel hole; a first blocking layer and a charge trapping and charge storage layer formed on sidewalls of the columnar cell channels; and a second blocking layer formed between the first blocking layer and the plurality of gate electrodes.
Public/Granted literature
- US20120146127A1 NONVOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2012-06-14
Information query
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