Invention Grant
- Patent Title: 6T SRAM architecture for gate-all-around nanowire devices
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Application No.: US13868626Application Date: 2013-04-23
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Publication No.: US09000530B2Publication Date: 2015-04-07
- Inventor: Karthik Balakrishnan , Josephine B. Chang , Paul Chang , Michael A. Guillorn
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Harrington & Smith
- Agent Louis J. Percello
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L29/06 ; H01L27/092 ; H01L21/84 ; H01L29/423 ; H01L27/11 ; H01L27/12 ; H01L21/8238

Abstract:
A memory device includes a first plurality of semiconductor nanowires tethered between landing pads and suspended over a substrate. A first gate electrode surrounds each of the first plurality of semiconductor nanowires, making them gate-all-around (GAA) semiconductor nanowires. First, second, and third field effect transistors (FETs) are formed by the first plurality of semiconductor nanowires. The memory device also includes a second plurality of semiconductor nanowires tethered between landing pads and suspended over the substrate. A second gate electrode surrounds each of the second plurality of semiconductor nanowires, making them GAA semiconductor nanowires. Fourth, fifth, and sixth FETs are formed by the second plurality of semiconductor nanowires. The first gate electrode is aligned with and cross-coupled to a landing pad of the second plurality of semiconductor nanowires, and the second gate electrode is aligned with and cross-coupled to a landing pad of the first plurality of semiconductor nanowires.
Public/Granted literature
- US20140312426A1 6T SRAM ARCHITECTURE FOR GATE-ALL-AROUND NANOWIRE DEVICES Public/Granted day:2014-10-23
Information query
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